Ulvac MS120A, Instruction Manual

Page: 3 / 69

i
YO２０-0938-DI-001-00
Before Use of This machine
Dry Pumps from ULVAC, Inc. (hereinafter referred to as "Our Company"): MS series (hereinafter referred to as
"this machine")
Upon receipt of the machine, please confirm the contents included are the same as you ordered and check the
machine for any damage attributed to transportation etc. just in case.
This instruction manual (hereinafter, "this manual") describes appropriate handling and maintenance
procedures to safely use this pump and to maximize its performance. Read this document in advance to
properly use this pump.
Install and operate this machine according to the local and national safety laws and regulations (such as fire
laws and electric wiring code). It is required to take a training for general safety of the country and the local area
where this machine will be used. Do not use this machine without any training.
The operator is required to have taken such trainings. In addition, the operator must have expertise, skills,
qualifications in electrics, mechanics, cargo handling, vacuum, etc.
This pump has been designed to conform to the rules in place when this document was created. Conformity is
not guaranteed because the applicable standards may change in the future.
Performance and safety may not be ensured if equipment connected to this pump does not conform to the
same rules or if the pump is altered. In such cases, we cannot guarantee (take responsibility for) performance
or safety. Product alterations made by the customer are not covered by the warranty, and we cannot take
responsibility for them.
Before installing or removing this machine, separate all energy sources (including power and cooling water)
from the product.
None of this pump's parts may continue to be used permanently while maintaining the performance upon
delivery. Performance inevitably degrades after a certain amount of time elapses, thus increasing the likelihood
of product problems even in assumed common usage scenarios. We ask that our customers perform preventive
maintenance to avoid problems in accordance with their usage scenarios. By performing preventive
maintenance measures, you can lower the probability of problems with this pump due to parts failures caused
by parts becoming worn out as well as the probability of other risks, such as downtime caused by pump
problems, fire, or effects on other processes. From the viewpoint of preventive maintenance, we also ask our
customers to prepare maintenance and inspection plans and to replace parts and perform overhauls according
to such plans.
If you have any questions about handling or other matters, please contact our nearest sales office or dealer.