Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
5. Maintenance and Inspection
Daily and regular inspection and maintenance work are required to maintain the original performance of this
machine and ensure safe use.
5.1 Daily Inspection
Check the following items to prevent pump failures and extend this machine's life.
Item Check item Troubleshooting
Color of lubricating oil
Confirm that oil color is colorless and
transparent. If it is turbid, contact to ULVAC
service center.
Cooling water
Confirm that cooling water flows at the
specified flow rate. Check the water pressure and
piping.
Water leakage Confirm that the floor is not wet.
Check the water pressure and
piping.
Purge gas
(In use of purge gas) Confirm that purge gas flows at the
specified flow rate. Check the supply pressure and
piping.
Abnormal noise, sound
or vibration Confirm that there are no abnormal noise,
sound or vibration. Check whether this machine,
piping, etc. are fixed in place.
Power value
Confirm that overload is not applied to the
pump. Check the intake pressure.
Check the exhaust side piping.
5.2 Inspection after Long-Term Storage
If this pump is stored for a long period of time without being operated (at least six months), trouble may occur
when the pump is operated due to rusting.
If the pump has not been used for a long period of time, request an inspection from your local ULVAC service
center before using the pump.