Ulvac MS120A, Instruction Manual

Page: 5 / 69

iii
YO２０-0938-DI-001-00
A warning label is attached onto a warning location on the machine. Before operating this pump, be sure to
confirm the warning contents.
▶
Warning Label Types and Descriptions
Parts with this warning label have a risk of electrical shock.
Turn off the primary power supply before starting wiring or maintenance.
During operation or for a while after operation stops, do not touch the unit as
each portion is at a very high temperature. Touching it may cause burns.
Do not operate this pump while equipment is attached that prevents gas from
moving to the exhaust port (e.g., that blocks the exhaust port). The pump's
internal pressure may rise, causing the casing or level gauge to rupture, oil
leakage, or motor overload. Explosive or flammable gas, gas that increases the
susceptibility of substances to fire, or other gas may ignite inside the pump, thus
increasing the pump's internal pressure.
Do not exhaust gas that has these characteristics.
Before pumping such a gas, dilute it sufficiently to the extent that the risk of
explosion and ignition is eliminated.
Before use, read through the instruction manual and fully understand its
contents.
Warning Label Types and Display Positions