Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
Appendix
The list of parts that must be replaced during an overhaul is as follows. The replacement timing differs
depending on the part. The recommended replacement periods indicated in the table below are for reference.
Actual periods may differ depending on usage conditions and the environment.
Table 14: Major replacement parts
Category Parts Name
Parts that must be replaced during an overhaul
Bearing
Power lock
Cooling water piping
Ｏ-ring
Lubricating oil
Oil seal
Level gauge
Check valve
Parallel key
LAN cable
Vibration-proof rubbers
Parts that must be replaced every two years
Bearing case
Seal sleeve
Slinger
Parts that must be replaced every three years
Inverter
Cooling fan
Parts that must be replaced every five years
Cylinder
Rotor shaft
Side cover
Motor
Timing gear
Controller
Noise filter
Major Replacement Parts