Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
3.5 Piping and Wiring
Shut off hazardous energy sources.
Before working on piping and wiring, make sure that all hazardous energy
sources are shut off referring to "1. For Safe Use" before starting work.
Piping and wiring need to be structured to absorb shaking.
Vacuum piping, cooling water piping, purge gas piping, and electric wiring need
to be structured to absorb shaking. This is to prevent braking or disconnection
of piping by the shaking.
3.5.1 Inlet/Exhaust Port Piping
Prevent the pressure on the exhaust side of this machine from increasing
to 0.03 MPaG or more.
Measure the pressure on the exhaust side of the pump. If it is 0.03 MPaG (0.3
kg/cm
2
G) (Gauge pressure) or more, remove those that are preventing gas from
passing through on the exhaust port side.
If the pressure in the pump increases to 0.03 MPaG or more, the pump may burst.
●
When connecting the pipe, remove the storage flange.
At the time of shipment from the factory of the MS series, a storage flange, inlet port mesh, and
desiccants are attached to the inlet flange section. When connecting the pipe, remove the storage
flange and also the desiccants.
●
For MS120A, blank either the vertical or horizontal exhaust port.
MS120A has two inlet ports: horizontal and vertical. Be sure to attach a flange to the unused inlet port.
* MS120A assumes the use of a horizontal inlet port. When using a vertical inlet port, attach a blank
flange to the horizontal inlet port. (The blank flange for the horizontal inlet port does not come
standard.)
● Do not allow foreign matters to enter the inlet/exhaust port of this machine.
When connecting the pipes, take care not to drop foreign matter (e.g. bolts) into the inlet/exhaust port
of this machine. If foreign matters drop, it is necessary to disassemble this machine and remove them.
Contact your nearest service center.
● Do not apply loads directly to the inlet/exhaust port of this machine.
Do not apply loads, such as the connection piping, directly to the inlet/exhaust port of this machine.
● Be careful not to damage the seat surface of the O-ring
Be careful not to damage the seat surface of the O-ring at inlet/exhaust port side. After assembling the
pipes, perform a leak test for the entire system.
●
Use piping with sufficient pressure resistance
If the exhaust piping consists of thin metal pipes, such as accordion type and bellows, the piping may
resonate due to exhaust pulsation, causing the noise to exceed the work environment reference
value. Use piping with sufficient compressive strength.
●
Secure the pipe diameter, path, and flow rate so that the exhaust piping is lower than the allowable
pressure.
In addition, the exhaust piping should be able to pass through without exceeding the allowable
pressure (0.03 MpaG) on the exhaust side with respect to the maximum flow rate (80m
3 /hr).
NOTES