Ulvac MS120A, Instruction Manual

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YO20-0938-DI-001-00
Ask a waste disposal specialist to dispose of this pump.
To dispose of this pump, ask a waste disposal specialist authorized by the
government.
Ask for entrust to a specialized processor for detoxification processing.
For an overhaul or disposal, entrust a processor specialized in waste disposal
to do the detoxification processing.
1.6.2 Transfer of heavy object
Never get under this pump.
The pump may fall or topple if a forcible operation is performed or if the equipment
is not sufficiently maintained. Never get under this pump.
Certified persons must perform loading work and operate the cargo-
handling machine.
Never perform loading work or operate the cargo-handling machine if you do not
have the appropriate certifications.
Failure to observe this instruction may lead to accident or injury.
1.6.3 Electrical shock
Before connecting the power, turn off the primary power supply.
Be sure to turn off the primary power supply before connecting the power.
Before inspection or relocation, turn off the primary power supply.
Be sure to turn off the primary power supply before inspection or relocation.
Be sure to connect the ground terminal.
A certified electrical worker must embed grounding or connect the ground line.
Incomplete grounding incurs the risk of electrical shock.
1.6.4 High temperature
Do not remove the face panel.
Never remove the face panel. This pump becomes very hot during operation and
remains hot for a while after operation stops. Touching it may lead to burns.