SPS Polos SPIN150i infinite Manual Download Page 67

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PolosSpin150i/200i

rev.: 1.0

Operating instruction

SPS-Europe B.V.

page

JH131115

A.2 Preset recipe

Name

Spin

Dispense

Time

Direction

Speed
Angle

Acceleration
Period

Output

Time

901.H

Coat

A-

type chuck, 1 cycle, “R1 Coater, R2 EBR, R3 N2”

901.1

Dispense

100

1000

901.2

Spin-up

2000

10000

901.3

EBR

500

1000

901.4

Dry

4000

1000

902.H

Develop

A-

type chuck, 5 cycles, “R1 Developer, R2 DIW, R3 N2”

902.1

Spray

PDL

1000

902.2

Puddle

PDL

1000

902.3

Rinse

1000

902.4

Dry

3000

905.H

Test

A-type chuck, 3 cycles

, “Device test”

905.1

CW-motion

1000

905.2

CCW-motion 10

CCW

1000

905.3

PDL-motion

PDL

1000

905.4

1rpm

1000

905.5

1000rpm

1000

905.6

5000rpm

5000

10000

Summary of Contents for Polos SPIN150i infinite

Page 1: ...Polos SPIN150i 200i infinite for software rev 1 11...

Page 2: ...ber directly assist the easy cleaning of the unit The touchscreen display are chemically resistant The system is built using industry proven quality components ensuring precise repeatable performance...

Page 3: ...ormation Contents 1 General information 2 Safety instruction 3 Specific safety instruction 4 Transportation and storage 5 Product description and facility requirement 6 Installation and commissioning...

Page 4: ...effectiveness The piping system especially joints must be maintained and serviced Regular checks for leaks must be performed on all screwing connections especially in case of temperature controlled re...

Page 5: ...nty We guarantee for the equipment as stated in the order contract This warranty will expire in case of interference into or modification of the system without prior consent of the manufacturer improp...

Page 6: ...wetted materials of the system are resistant to the chemical s applied Please consult the technical data section for wet material list or contact SPS Europe B V in case of uncertainty DANGER Chemicals...

Page 7: ...entation or on the system itself can result in personal injury or death of the operator or of persons being close by The system other equipment or the environment can be seriously damaged as well WARN...

Page 8: ...0 Operating instruction SPS Europe B V page 8 JH131115 CAUTION Do not take actions on the system other than described in this manual CAUTION Do not operate the system while covers or other protective...

Page 9: ...ction Note The above symbols refer to SPS Europe B V components and parts However components and parts of sub suppliers may show other symbols not expressly mentioned or referred to in this manual DAN...

Page 10: ...ll employees involved on system utilization 2 5 Personnel obligations WARNING All personnel involved in system utilization must be qualified accordingly relevant task knowing the perils and being able...

Page 11: ...le indicators must be known by all personeel operating with the system 3 2 Safety devices Depending on your system configuration one or more of following safety device could be present on your system...

Page 12: ...epending on design or type may arise in the following ways mechanical hazard caused by squeezing shearing and cutting catching and winding stitching or by freely moving parts thrust caused by kinetic...

Page 13: ...ing on substrate to be used the maximum spin speed of your system must be limited Please consult the system specific datasheet or contact manufacturer for detailed spin speed recommendation DANGER Ope...

Page 14: ...supply or inside the system Insufficient grounding can cause additional electrostatic charging of plastic parts hoses or pipes and the system as a whole DANGER This system operates under high voltages...

Page 15: ...everal precautions are essential Wear a grounded wrist strap or work on a grounded static dissipating work surface Leave electronic components and printed circuit boards in their original packaging un...

Page 16: ...s used including but not limited to Safety glasses goggles and or face shields Chemical gloves Protective suit with long sleeves Chemical aprons Closed toe shoes Long pants DANGER When handling aggres...

Page 17: ...rosives Inflammable explosive toxic Do not inhale its vapors danger of suffocation and or poisoning Prevent electrostatic charging Beware of ignition sources Do not smoke Do not eat danger of poisonin...

Page 18: ...power supply prior to opening of the system In case work has to be done while the system remains open for adjustments maintenance etc it should only be done by qualified personnel knowing all potentia...

Page 19: ...emergency immediately stop the actual process and await complete stand still of the system within a safe distance DANGER Close all supply line VAC CDA N2 DI Water etc except exhaust system if availab...

Page 20: ...has to be paid that the unit is adapted to ambient temperature Due to alteration to temperature during transport unwanted length modification may occur Keep the system for at least 24 hours under appr...

Page 21: ...ng instruction SPS Europe B V page 21 JH131115 5 Product description 5 1 Package content 1 Chuck depending on actual model available chuck may differ 2 Spin processor 3 Stylus 4 Manual 5 POE connector...

Page 22: ...tion SPS Europe B V page 22 JH131115 5 2 System overview Top view 1 Lid latch 2 Sealing O ring 3 Spin processor chamber 4 Drain hole 5 Chuck holder 6 Lid sensor 7 Lid lock 8 Stylus holder 9 Touchscree...

Page 23: ...rating instruction SPS Europe B V page 23 JH131115 Back side view 1 Lid hinge 2 Option holding features 3 Power switch 4 Information label 5 Drain connection port 6 Facility media connections Power Va...

Page 24: ...shown in following picture 1 Dry relay 2 Vacuum 3 Motor purge 4 Compressed air Optional 5 Ethernet Optional 6 Power plug Depending on your system configuration some details may differ respect the one...

Page 25: ...without vacuum special spin chucks have to be used and maximum speed has to be reduced WARNING Important Test the values of parameter in a test environment without fluids to make sure that program an...

Page 26: ...arts please refer to the manufacturer All package material has to be stored for use if further shipment is required 6 3 Installation site The Polos spin processor will operate correctly under followin...

Page 27: ...data for details or contact SPS Europe B V in case of uncertainty 6 5 Positioning Position the Polos spin processor on a stable flat vibration free and safe surface not to be deformed under the weigh...

Page 28: ...ystem has to be connected to assure proper chamber draining After removing the drain closing cap by unscrewing counterclockwise a 1 MNPT will be then available for connecting the drain tube CAUTION A...

Page 29: ...this order 1 Motor purge 2 Dry relays Optional 3 CDA Optional 4 Vacuum 6 9 Connecting to power supply Power plug is located on system back side as described in relative section Make sure that the mai...

Page 30: ...ck and adjust slider 2 so that it slightly touches substrate edge Tight locking screw 4 to fix the slider 2 6 11 Test procedure Before commissioning the unit must be tested executing preset recipes na...

Page 31: ...d correctly DANGER The system may never be switched on nor operated without all required connection Vacuum CDA N2 Drain etc being verified and provided DANGER Never touch a rotating spin chuck in the...

Page 32: ...een interface will start showing several loading screen wait until home screen will been shown If any error indicator is active interrupt starting procedure and contact maintenance service 7 4 Open th...

Page 33: ...may lead to system damage and or substrate damage Switch on the Polos spin processor following instruction provided in relative paragraph of this manual Open the lid following indication provided 1 C...

Page 34: ...7 6 Loading a substrate Place the centering tool 4 on the border of the process chamber and make sure that The tool body 4 makes close contact with the labyrinth sealing cap 3 Place the substrate 1 on...

Page 35: ...PolosSpin150i 200i rev 1 0 Operating instruction SPS Europe B V page 35 JH131115 Always verify substrate centering before starting a recipe otherwise substrate may be lost due centrifugal force...

Page 36: ...eset recipes is provided in appendix Additional recipes can be downloaded from our website www spincoating com CAUTION Some recipes are designed for specific unit that may not match to actual unit set...

Page 37: ...ng instruction SPS Europe B V page 37 JH131115 8 Software instruction 8 1 Start screen When unit is powering up following screen will appear Wait until loading bar on page bottom will be completed unt...

Page 38: ...ave one or more pages the picture above shows three pages In case more than one page is present the sliders on the top of the screen 3 or the buttons 4 and 5 on the sides of the screen will be activat...

Page 39: ...er level is allowed The user can return to the home screen by clicking Move a recipe or a folder To move a recipe or a folder following steps are required 1 Press a long time on a recipe folder symbol...

Page 40: ...End the edit mode clicking on EXIT Edit Interchange the place of 2 recipes 1 Press a long time on a recipe folder symbol in the home screen Selected item will appear at the bottom of the home screen...

Page 41: ...System status Shows information regard unit such as status of lid lock actual vacuum pressure and possible error 4 Recipe graph Provides a graphical reference of recipe progress and information about...

Page 42: ...s shown in bold The command button 10 11 and 12 will be replaced by following sign Abort a recipe When a recipe is active touching the stop button 11 will cause the motor to stop and the valves or rel...

Page 43: ...elative to actual step lights in green It is possible to execute a recipe starting from different step just selecting it while the unit is in idle mode While a recipe is running the operator can move...

Page 44: ...egarding the actual and total number of steps and the actual total number of programmed cycles 3 Header and steps selection Indicated selected header or step highlighted in green and allows to select...

Page 45: ...tened in the selection list 3 It is possible to return header editing at any time selecting in the selection list 3 In the parameter screen 4 following parameters may be edited Symbol for the recipe a...

Page 46: ...e system additional pages may be available Selecting each page following parameters will be available Spin parameters The spin page contains the following parameters Time for the step to spin Motor sp...

Page 47: ...pin150i 200i rev 1 0 Operating instruction SPS Europe B V page 47 JH131115 Dispensing parameters The spin page contains the following parameters Touch each output here 3 relays to activate them in the...

Page 48: ...umber Selecting an existing recipe ID number will prompt a question box informing that recipe is already present asking for confirmation for overwrite Confirm overwrite selecting yes touch no to retur...

Page 49: ...electing an individual or multiple recipe s entire folder s or the whole database 4 Recipe details Description number of steps and cycles icon position defined as page row and column 5 Scroll bar Scro...

Page 50: ...contents WARNING This operation is irreversible and cannot be undone Be sure to make a backup copy before deleting required recipe Each recipe or folder can be selected clicking on the corresponding...

Page 51: ...ders into an archive file select required ones and touch back up button 10 Note Please make sure that a USB stick is connected to the system before you start this function In prompted menu input the f...

Page 52: ...previously created on a USB stick To restore some recipes and folders from an archive file touch restore button 11 Note Please make sure that a USB stick is connected to the system before you start t...

Page 53: ...ower of the unit until above message appears otherwise selected data may be lost and system filenames corrupted In case a recipe present on internal memory drive has the same ID number as a recipe in...

Page 54: ...ents accidental or unauthorized changes in the setup Please refer to appendixes for complete parameters list or contact SPS Europe B V in case of uncertainty WARNING System parameters may never be mod...

Page 55: ...on to accept click on CANCEL button to exit the prompt screen without modifying relative parameter value Acceptable values must be between the min max values as indicated in relative column Note Any p...

Page 56: ...B V page 56 JH131115 8 7 Information screen Touching the about button on home screen menu showing unit details and contact information will appear Leave the information screen touching Close button No...

Page 57: ...ntensity and the type of applied media WARNING All maintenance and service tasks have to be carried out by specially qualified persons only knowing the perils and being able to prevent them by applyin...

Page 58: ...odically flush the drain line to remove all trace of chemicals Regularly execute rinse and purge cycles to prevent chemical to stand still inside dispensing system If required rinse the hoses with sui...

Page 59: ...ocess chemicals etc ambient temperature 10 C to 60 C ambient relative humidity max 80 no condensation dust free and protected eventually packed up When removing from storage prior to installation keep...

Page 60: ...loat Alternative dome transparent dome in lid ECTFE Touchscreen Cover made of POLYESTER Drain Drain connection PP Natural Polypropylene 1 MNPT external thread optional drain hose NPP Natural Polypropy...

Page 61: ...OD 8mm Minimum supply line diameter ID 6 mm OD 8mm For the correct operation of vacuum chucks and adapters the vacuum supply requirements are Drain Connector 1 M NPT external thread The drain comes s...

Page 62: ...regulations as well as chemical supplier s instructions chemical safety data sheet plus additional instructions 11 5 Noise emission Noise level of the unit 55 dbA 11 6 Applicable directive Polos spin...

Page 63: ...on the size and weight of the substrate and the used spinner unit Unit comes standard with A V36 S45 PP suitable for substrate larger than 45 mm and fragment adapter D V10 S50 PP for substrate larger...

Page 64: ...chuck Requires centering tools B L type Specific size vacuum chuck with centering pins for round or square rectangular substrate For high speed application C E type Specific size chuck with centering...

Page 65: ...vacuum chuck with clearance for round and square rectangular substrate For back side processing J type Foil adapter For thin or flexible substrate K type Vacuum chuck for rectangular substrate With e...

Page 66: ...e B V page 66 JH131115 Materials Chucks are available in following materials PP NPP with EPDM o ring FP PTFE TFM 1600 with FKM o ring EC ECTFE SS Stainless Steel AL Aluminum Note other materials avail...

Page 67: ...R 10 CW 500 1000 R2 10 901 4 Dry 20 CW 4000 1000 R3 20 902 H Develop A type chuck 5 cycles R1 Developer R2 DIW R3 N2 902 1 Spray 5 PDL 90 1000 R1 5 902 2 Puddle 10 PDL 90 1000 902 3 Rinse 10 CW 1000 1...

Page 68: ...could be limited per factory requirment Notes Default Min Max User vacuum_ok 48 10 100 minimal value of the vacuum kPa Admin time_let_lid_unlock ed 5 0 5 time to let the lid unlocked lid_unlocked_late...

Page 69: ...PolosSpin150i 200i rev 1 0 Operating instruction SPS Europe B V page 69 JH131115 A 5 Dimensioned drawings Spin150i...

Page 70: ...PolosSpin150i 200i rev 1 0 Operating instruction SPS Europe B V page 70 JH131115 Spin150i detached satellite controller...

Page 71: ...PolosSpin150i 200i rev 1 0 Operating instruction SPS Europe B V page 71 JH131115 Spin200i...

Page 72: ...PolosSpin150i 200i rev 1 0 Operating instruction SPS Europe B V page 72 JH131115 Spin200i detached satellite controller...

Page 73: ...ungsrichtlinie 2006 95 EG EU LowVoltage directive 2006 95 EC Der Hersteller The Manufacturer Midden Engweg 41 3882 TS Putten The Netherlands erkl rt hiermit da folgendes Produkt hereby declares that t...

Page 74: ...GERMANY Tel 49 841 370 530 Fax 49 841 370 5322 info de sps europe com Belgium Spain Portugal Israel S P S bvba Steenweg op Withof 5 B 2960 St Job in t Goor BELGIUM Tel 32 3 440 0895 Fax 32 3 440 5181...

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Summary of Contents for Polos SPIN150i infinite

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