PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
34
JH131115
CAUTION!
Cover drain hole to avoid screws loss.
WARNING!
Drain holes must always be free of obstacle. Always assure that there
isn’t any
object obstructing it.
7.6 Loading a substrate
Place the centering tool
(4)
on the border of the process chamber and make sure
that
The tool body
(4)
makes close contact with the labyrinth sealing cap
(3)
.
Place the substrate
(1)
on the chuck and check the position of the wafer from
different sides to verify that it touch the slider end
(2)
until it lies in the center of the
chuck
.
Note:
The centering tool is suitable for rounded and squared substrates.
CAUTION!
3
1
4
2
