PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
57
JH131115
9
Maintenance and cleaning
DANGER!
If dangerous chemicals have been used inside the
Polos
spin processor, rinsing of
the chamber is required to remove chemicals residual before accessing any
contaminated part of the system.
DANGER!
Prior to all maintenance and cleaning work inside the unit, the unit and additional
modules have to be disconnected from all external and media supplies except for
motor purge and exhaust.
Pay attention to all additional safety instructions in referring section.
9.1 Maintenance
The standard maintenance of
Polos
spin processor consists of cleaning the system
exterior, process chamber, chucks and all additional component(s).
Note:
cleaning intervals depend on usage intensity and the type of applied media.
WARNING!
All maintenance and service tasks have to be carried out by specially qualified
persons only, knowing the perils and being able to prevent them by applying
suitable safety measures.
Note:
Maintenance and repair work required, but not listed in this manual, should
only be done by
SPS-Europe B.V.
service or by persons of equivalent qualification.
9.2 Cleaning
Prior to performing any cleaning steps assure that motor purge is active and all
other facility has been disconnected (see
section “Required media” of this manual
for details).
Activate drain valve considering activating the applicable valve for drainage system
as shown in system specific datasheet provided in appendix.
Note:
Motor purge must be provided during all cleaning operations.
WARNING!
The Spin processor has a sophisticated design to protect the motor from chemical
ingress. To ensure this system works correctly, motor purge must be supplied to the
system at any time.
