PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
33
JH131115
7.5 Insert or change the chuck
DANGER!
Only use chucks applicable to specific process and substrate.
Note:
please refer to
appendixes, drawings and the section technical data
for
details or contact
SPS-Europe B.V.
in case of uncertainty.
Use of improper chuck may lead to system damage and/or substrate damage
Switch on the
Polos
spin processor following instruction provided in relative
paragraph of this manual.
Open the lid following indication provided.
1. Centering holes
2. Centering pins
3. Fixing screws
4. Screw holes
Gently press chuck on motor shaft paying attention that centering pins
(2)
slide
easily through right holes
(1)
.
CAUTION!
Screws have to be hand tighten otherwise plastic screws could be damaged.
If provided with the chuck fit screws
(3)
on chuck holes
(4)
.
Tighten the screws.
4
3
2
1
