PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
31
JH131115
7
Operation
7.1 Safety indication
WARNING!
When accessing process chamber, pay attention to all additional safety instructions
in referring section.
DANGER!
Depending on form and size of substrates, special spin chucks are used.
Use only a spin chuck suited for the actual substrate. Refer to appendix for list of
available chuck and relative details.
DANGER!
Make sure that the substrate is placed correctly.
DANGER!
The system may never be switched on nor operated without all required connection
(Vacuum, CDA, N2, Drain, etc.) being verified and provided.
DANGER!
Never touch a rotating spin chuck in the process chamber.
DANGER!
Assure the correct installation of the drain system.
DANGER!
In case of interruption of the spin process dangerous media residues can still be
present on the substrate and in the system.
Please make sure to carefully rinse the process chamber and the substrate before
removing the substrate.
A spinning process is composed by following steps:
Creating a recipe.
Placing a substrate on the spin chuck.
Starting the recipe.
Removing the processed substrate.
