PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
14
JH131115
DANGER!
Contamination of the spin processor.
The spin processor has always to be operated with chuck and wafer/substrate.
In case of use of vacuum chuck (non etching application) always operate the
system with substrate loaded on chuck.
DANGER!
If required by processed chemical(s), the spin processor has always to be operated
with active exhaust system and providing all media required.
Whenever it is likely that the system is no longer mechanically safe, make it
inoperable and secure it against any unauthorized or unintentional operation.
Electrical hazards:
DANGER!
The system needs to be grounded in all cases. Do not remove or cut off any ground
wire of power supply or inside the system. Insufficient grounding can cause
additional electrostatic charging of plastic parts, hoses or pipes, and the system as
a whole.
DANGER!
This system operates under high voltages. Danger of high voltages exists even
when the system is switched off, but still connected to the power supply.
Capacitors within the system may be charged even in case the system is switched
off and disconnected from mains supply line.
DANGER!
While switched on, electrical connectors will be live. Opening of covers or removing
of parts may result in exposure to live parts.
DANGER!
Interchange of current-bearing wires may result in danger for health and life of
operator. Connection to the mains supply has to be effected by a qualified
electrician according to prevailing regulations. Neutral wire (blue) and ground wire
(green/yellow) have to be connected in due form.
DANGER!
Persons bearing a pacemaker may not operate, clean or service the unit.
