PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
6
JH131115
2
Safety instruction
2.1 Intended use
The
Polos
is a process tool for typical spin process applications of wafers and other
substrates.
The range of applications depends on components and options installed, it includes
but it is not limited to:
Cleaning
Drying
Coating
Developing
Etching
Intended use includes:
adherence to entire instruction manuals
adherence to prescribed commissioning, operating and service instructions
adherence to prescribed inspection intervals
DANGER!
Chemicals
Customer has full responsibility and liability to assure that all wetted materials of the
system are resistant to the chemical(s) applied.
Please consult the technical data section for wet material list or contact
SPS-
Europe B.V.
in case of uncertainty.
DANGER!
Chemicals
Without proper protection the system is not suited for the application of explosive or
hazardous chemicals.
DANGER!
This
Polos
spin processor is not suited or designed for any other applications than
the ones stated above.
Any modification of the system requests manufacturer’s prior consent as well as his
confirmation in writing.
Note:
Our products are continuously modified and improved due to innovation, legal
requirements and standards. As a consequence, the information given in this
documentation may not accurately reflect every detail of the system actually
delivered.
Please contact the
SPS-Europe B.V.
in cases of uncertainty.
