PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
30
JH131115
6.10 Adjust centring tool
Release the locking screw
(4)
so that the slider
(2)
can move freely.
Place the centering tool such as its end
(3)
makes close contact with the labyrinth
sealing cap
(1)
.
Position desired substrate centered on the chuck and adjust slider
(2)
so that it
slightly touches substrate edge.
Tight locking screw
(4)
to fix the slider
(2)
.
6.11 Test procedure
Before commissioning the unit must be tested executing preset recipes named
“Test”.
Unit will perform several steps involving all unit capability, recipe details are
indicated in appendix of this documentation.
Verify that unit is performing all steps properly without excessive noise or vibration.
The
Polos
spin processor is now ready for usage, otherwise please contact
manufacturer
2
1
4
3
