PolosSpin150i/200i
rev.: 1.0
Operating instruction
SPS-Europe B.V.
page
58
JH131115
Housing
The
Polos
housing can be cleaned with a dust and lint free cloth, and ISO propanol
or equal solvents as required.
Display
The touch screen display should only be cleaned with a damp cloth.
Chamber
Always clean the chamber with suitable method after each process is complete
prevent chemical to stand still inside the chamber.
The process chamber should be cleaned according to the dispensed materials -
always ensure cleaning chemicals are fully compatible with the specifications of
wetted materials
Additional components(Optional)
Periodically flush the drain line to remove all trace of chemicals.
Regularly execute rinse and purge cycles to prevent chemical to stand still inside
dispensing system.
If required rinse the hoses with suitable cleaning agents. The type of cleaning agent
depends on the process media used before.
CAUTION!
Ensure vacuum is switched
off
while cleaning and close vacuum holes in order to
avoid chemicals entering the vacuum line.
CAUTION!
Clean the chuck, the process chamber and the process chamber interior only with
DI water or a solvent which is suitable for chamber materials and chemicals used.
Note:
please refer to
appendixes, drawings and section technical data
for
details or contact manufacturer in case of uncertainly.
CAUTION!
Do not use scratching or scouring cleaning agents or tools, otherwise the system
could be damaged.
