Primes MicroSpotMonitor Plus HighBrilliance, Original Instructions Manual

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Revision 00 EN - 02/2022
MSM+ HB
35,0(6
If the purge air is not connected, dust can enter the objective directly when the cyclone is mounted.
1. Turn on the purge air (see chapter 8.10 on page 43)
2. Remove the aperture lock by loosening the four screws.
Aperture lock
Sealing ring
Fig. 7.3: Aperture lock at the beam entrance
3. Store the aperture lock and the O-ring in a clean, sealable plastic bag. If you store or transport the de-
vice, you should remount the aperture lock.
4. Fasten the cyclone to the objevtive with the four screws.
5. Cover the cyclone with the alignment tool.
7.3.3 Moving camera housing to axis center position
X Before aligning and mounting the device, check the approximate z-position of the camera housing.
If the camera housing is in home position, it cannot be moved further down on the z-axis during
measurement. We recommend moving the camera housing to the center position of the z-axis before align-
ment. If a caustic measurement is to be performed, the same amount of travel is available on both sides of
the expected beam focus.
CAUTION
Crushing hazard
The camera housing of the device can be moved along the z-axis.
X
Never reach into the traversing range of the camera housing.
NOTICE
Damaging / destroying the device
The camera housing of the device can be moved along the z-axis. Obstacles in the traver-
sing range of the device can lead to collisions and damage the device.
X
Always keep the traversing range of the camera housing free of obstacles.
Proceed as follows to move the camera housing to the axis center position:
1. Establish the electrical connections according to chapter 8 on page 35.
2. Switch on the device and connect it to the LaserDiagnosticsSoftware LDS according to chapter 9.3 on
page 47.
3. Open the
Device control
menu according to chapter 9.4.1 on page 51.
4. Move the camera housing to the axis center position according to chapter 9.4.2 on page 51.