Primes MicroSpotMonitor Plus HighBrilliance, Original Instructions Manual

Page: 15 / 116

15 Revision 00 EN - 02/2022
MSM+ HB
35,0(6
There are two levers on the side of the device for adjusting the magnification. With these two levers, either a
magnification objective or an adjustment lens can be inserted into the beam path.
The magnification objective can be inserted on the image side by moving both levers to the upper position.
The alignment objective can be inserted into the beam path by moving both levers to the lower position.
The alignment objective simplifys the beam search, since the measuring range (in x, y) is increased. For the
measurement, the best suited objective should be chosen.
4.3 Measuring principle
There are several beam splitters integrated in the measuring objective so that 99.9 % of the laser power is
guided to appropriately dimensioned absorbers. The laser beam is attenuated by further optical elements in
the device until it can be guided to a CCD sensor.
Measuring plane
Upper limit
Mirrors
Trigger diode
Filter wheel
Lower limit
Measuring objective
Magnification objective (MO)
Absorber
Laser beam
Absorber
Alignment objectiv (AO)
CCD-sensor
Fixed filter
Prisms
Fig. 4.5: Schematic illustration of the optomechanical design