Primes MicroSpotMonitor Plus HighBrilliance, Original Instructions Manual

Page: 93 / 116

93 Revision 00 EN - 02/2022
MSM+ HB
35,0(6
11.4.3 Exchange beam splitter
Observe the warning messages at the beginning of this chapter.
1
6
3
4
2
5
Components:
1. Cylinder pin ISO 2338 m6 4x12
2. Beam splitter
3. Labeling “Arrow” has to point downwards.
4. Optics tube
5. Coupling ring
6. Drilling
1. Remove protective window retainer, see previous
chapter.
2. Remove coupling ring (5).
3. Pull optics tube (4) out of the housing.
4. Remove the beam splitter (2).
5. Clean the beam splitter thoroughly. A new beam split-
ter has to be cleaned before it can be built in as well.
6. Turn the beam splitter until the arrow (3) on its side
points downwards, see figure.
7. Put in the beam splitter carefully.
8. Push the optics tube back into the housing. The pin (1)
has to be pushed into the drilling (6).
9. Screw the coupling ring on manually.
10. Check the protective window in the protective window
retainer for contaminations. If necessary, it has to be
replaced (see the previous chapter).
11. Mount the protective window retainer.
Fig. 11.4: Exchanging beam splitter