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Setting Measurement Items
ZFX-C User’s Manual
3
SETTING THE MEAS
UREM
ENT CONDITIONS
79
Possible output results
The following values can be output when expressions are set.
Position Difference p.50
Item
Description
Message
Judgment result
The judgment result is output. (0:OK, -1:NG, -2: not measured)
Judge (JG)
Edge width
The measured edge width is output. (0 to 9999.999)
Width (WD)
Edge position 1/2
The X, Y coordinates of the edge position are output.
(-9999.999 to 9999.999)
The start point side of the region becomes Position X1/Y1, and the
end point side becomes Position X2/Y2.
Position
X1, Y1, X2, Y2
(X1, Y1, X2, Y2)
Reference edge width
The edge width when the measurement region is set is output.
(0 to 9999.999)
Reference width (SW)
Reference edge position
1/2
The X, Y coordinates of the edge position when the measurement
region is set are output. (-9999.999 to 9999.999)
Reference
X1, Y1, X2, Y2
(SX1, SY1, SX2, SY2)
Width difference
The width difference obtained by "measurement value - reference
value" is output. (-9999.999 to 9999.999)
Width dif. (DW)
Position difference 1/2
The difference obtained by "measurement position - reference
position" is output. (-9999.999 to 9999.999)
Position dif.
X1, Y1, X2, Y2
(DX1, DY1, DX2, DY2)
Important
Summary of Contents for Smart Sensor ZFX-C
Page 2: ......
Page 125: ...Additional Functions 122 ZFX C User s Manual MEMO ...
Page 135: ...Checking Adjusting the Measurement ADJ Mode 132 ZFX C User s Manual MEMO ...
Page 221: ...Menu List 218 ZFX C User s Manual MEMO ...
Page 225: ...INDEX 222 ZFX C User s Manual MEMO ...
Page 226: ...INDEX ZFX C User s Manual 8 APPENDICES 223 MEMO ...