5.1 Check with Instrument Main Unit Alone
5.1.3 Noise Level (RMS)
(1) Display the screen for each item of instrument performance
check (Fig. 5-11). For display method, follow the
procedure starting from section 5.1.. Using the [
▲
]/[
▼
]
key, move the cursor to Noise Level (RMS), and then select
[1] Yes. Noise level will be checked. If check is not
desired actually, select [2] No.
Performance
CELL A
WL Accuracy (484.6 nm)
WL Accuracy (229.0 nm)
WL Accuracy (822.8 nm)
WL Repeatability
Noise Level (RMS)
Baseline Flatness
Baseline Stability
Hardware
Print Report
Execute(Manual)? :：＿
□
1 Yes □
2 No
Fig. 5-11 Screen for Each Item of Instrument
Performance Check
(2) The guidance for informing the parameter setting process
(Fig. 5-12) appears, and parameters will be set and noise
level will be checked.
Setting PARAM....
Fig. 5-12 Guidance for Parameter Setting Process
(3) After the check of noise level, the screen after this check is
displayed as shown in Fig. 5-13. Measurement result is
indicated on the noise level line followed by OK when the
judgment standard is met or NG if not met. If NG is
indicated, check the noise level again in the correct
procedure. If NG recurs, refer to section 6.8.
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