Function and design
multi EA 5100
24
main
inlet
dryer
seal
bypass
A
r
O
2
A
B
D
F
ilt
e
r
2
3
4
5
6
7
8
1
9
1
0
1
1
1
2
1
3
1
4
1
5
1
6
ABD
Gas box
Combustion furnace
Rotary bearing
Rotary bearing
Coupling
Exhaust
Membrane dryer
Filter
Pump
to the N/S/C detector
N/S/C
outlet
MFM
Cl system tightness
test
Figure 10Hose diagram for horizontal operation