CyberOptics AMS-150C, User Manual

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Reading the Vibration Trace Display
The AMS is like a seismograph, but instead of charting movements in the earth’s plates, you’ll probably be using
the AMS to look for unwanted vibrations in wafer handling and processing equipment. The AMS continuously
detects vibrations and transmits the readings to the MultiView application. MultiView displays the readings as
traces, similar to the traces on a seismograph drum. You can place the AMS in a tool, run the manufacturing
equipment through its paces, and watch the MultiView display for levels of vibration that might indicate a
problems with the equipment, such as places where the AMS is making unwanted contact with a tool.
Appendix C
describes acoustic resonances and other factors that affect vibration measurements.
To use the AMS
Vibration system:
1)
Make sure the computer running the MultiView software is within the range of the link module, up to 30 ft
(10 m).
2)
Normally, you would place the AMS on the equipment you want to check, and then start the equipment in
motion, monitoring the MultiView display. To get a feeling for how the AMS works, for now just set the AMS
on a desk or table.
3)
Start the MultiView application.