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248
5975 Series MSD Troubleshooting and Maintenance Manual
9
Parts
KF25 O-ring assembly (for turbo pump outlet)
0100-1551
4
Micro-Ion Vacuum Gauge vacuum gauging electronics
G3170-80001
2
Performance turbomolecular pump
G3170-89062
2
Standard turbomolecular pump
G3170-89061
Turbo pump seal with shield
0905-1613
3
Turbo power supply only
G3170-60600
Turbo separate power supply-control wiring harness
G3170-60835
5
Analyzer chamber (manifold)
G3170-20560
Manifold EMC gasket
G3170-80031
Table 20
Turbo pump MSD vacuum system components (
Figure
59
) (continued)
Item
Description
Part number
Summary of Contents for 5975C TAD VL MSD
Page 1: ...Agilent Technologies Agilent 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 8: ...8 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Page 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Page 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Page 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Page 270: ...270 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts...