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Parts
9
5975 Series MSD Troubleshooting and Maintenance Manual
247
Turbo pump and related parts
Figure 58
Diffusion pump and related parts
1
2
3
Table 20
Turbo pump MSD vacuum system components (
Item
Description
Part number
Claw clamps for baffle adapter, standard turbo
G3170-60590
Clamp for vacuum gauging
0100-1397
1
Fan (for high vacuum pump)
G1099-60564
KF25 clamp (for turbo pump outlet)
0100-0549
Summary of Contents for 5975C TAD VL MSD
Page 1: ...Agilent Technologies Agilent 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 8: ...8 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Page 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Page 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Page 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Page 270: ...270 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts...