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246
5975 Series MSD Troubleshooting and Maintenance Manual
9
Parts
Diffusion pump packaging cap
G3170-40540
2
Fan (for high vacuum pump)
3160-1037
3
Foreline gauge assembly
G1099-60545
Foreline gauge seal
0905-1463
KF10/16 clamp (diffusion pump outlet)
0100-1397
KF10/16 seal (diffusion pump outlet)
0905-1463
KF50 clamp
0100-1395
KF50 seal (foreline pump to baffle adapter)
0100-1884
Side plate (includes feedthroughs and thumbscrews)
G1099-60021
Analyzer chamber
G3170-20549
Table 19
Diffusion pump MSD vacuum system components (
Figure
58
) (continued)
Item
Description
Part number
Summary of Contents for 5975C TAD VL MSD
Page 1: ...Agilent Technologies Agilent 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 8: ...8 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Page 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Page 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Page 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Page 270: ...270 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts...