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5975 Series MSD Troubleshooting and Maintenance Manual
1
Introduction
5975 Series MSD Version
5975 Series MSDs are equipped with a diffusion pump or one of two
turbomolecular (turbo) pumps. The serial number label displays a product
number (
) that indicates what kind of MSD you have.
Table 1
Available high vacuum pumps
Model name
Product number
Description
Ionization modes
5975C TAD VL MSD
G3170A
Diffusion Pump MSD
Electron impact (EI)
5975C TAD inert MSD
5975C TAD inert XL MSD
G3171A
G3172A
Standard Turbo MSD
Performance Turbo MSD
Electron impact (EI)
Electron impact (EI)
5975C TAD inert XL EI/CI
MSD
G3174A
CI Performance Turbo Pump
Electron impact (EI)
Negative chemical ionization (NCI)
Positive chemical ionization (PCI)
7820 VL MSD
G3175A
Diffusion Pump MSD
Electron impact (EI)
7820 MSD
G3176A
Standard Turbo MSD
Electron impact (EI)
Summary of Contents for 5975C TAD VL MSD
Page 1: ...Agilent Technologies Agilent 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 8: ...8 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Page 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Page 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Page 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Page 270: ...270 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts...