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Instruction Manual

ZEISS SIGMA series

Field Emission Scanning Electron Microscope

Содержание SIGMA Series

Страница 1: ...Instruction Manual ZEISS SIGMA series Field Emission Scanning Electron Microscope...

Страница 2: ...copies for archiving purposes shall remain unaffected thereby Any viola tions may be prosecuted as copyright infringements The use of general descriptive names registered names trademarks etc in this...

Страница 3: ...Hazards 16 2 3 9 Suffocation Hazards 17 2 4 Warning Labels and Lights 18 2 4 1 Warning Labels 18 2 5 Safety Devices and Interlocks 22 2 5 1 Protective Cover Panels 23 2 5 2 Main Disconnect Device 23 2...

Страница 4: ...Modifying the Probe Current License OPTIPROBE 98 5 5 5 Changing the Extractor Voltage 98 5 6 Finding Appropriate Detector Settings 99 5 6 1 Selecting a Detector 99 5 6 2 Setting up the InLens SE Dete...

Страница 5: ...7 2 1 Baking out the Gun Head 138 7 2 2 Calibrating OptiProbe 140 7 3 Power Circuit 140 7 3 1 Checking the Position of the Circuit Breakers 140 7 4 Detectors 141 7 4 1 Lubricating the Rod 141 7 5 PC...

Страница 6: ...ntains information about starting the microscope and the software obtaining a first image adjusting important parameters and power ing down the microscope also in emergency Care and Mainte nance Infor...

Страница 7: ...he Safety chapter are to be considered but also the safety instructions and warnings in other chapters Failure to comply with these instructions and warnings can result in both personal injury and pro...

Страница 8: ...are For more detailed information on how to use SmartSEM please refer to its Online Help or ask your ZEISS Sales Service Partner System and 3rd Party Components Accessories The Microscope System can b...

Страница 9: ...ZEISS 1 General Information 1 4 Contact Fax 49 7364 20 3226 Email service microscopy de zeiss com Instruction Manual ZEISS SIGMA series en US Rev 7 352102 9344 006 9...

Страница 10: ...emental analysis with optional EDS spectroscopy at the focused electron beam position Crystal structure and orientation with optional EBSD detectors Info Not for therapeutic treatment or medical diagn...

Страница 11: ...authorized by ZEISS to do so 2 2 1 Safe Operation Conditions If the product safety labels are covered or worn or if any of the safety devices are not in proper working condition operation of the micro...

Страница 12: ...der spare parts Unless authorized by ZEISS all spare parts should be installed by a ZEISS service representa tive 2 3 Prevention of Hazards This section summarizes potential hazards and recommended sa...

Страница 13: ...ervice the oil mist filter refer to pump manual and material safety data sheets Recommended is the connection to an exhaust line NOTICE Environmental risk due to disposal of aggressive or toxic chemic...

Страница 14: ...bar If not properly handled the contained gas can abruptly escape and cause the gas cylinder to move in an uncontrollable manner 4 Observe all safety labels on the gas cylinders and all safety instru...

Страница 15: ...s or the vibration block is moved body parts can be crushed 4 Take care when moving ancillary equipment CAUTION Moving the specimen stage Fingers can be trapped by the moving specimen stage 4 Always c...

Страница 16: ...This is unavoidable because elec trons are accelerated by voltages up to 30 kV 4 Do not remove any parts around the column and chamber that are essential for radiation protection 4 Use genuine ZEISS p...

Страница 17: ...the area around the microscope is sufficiently vented 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of...

Страница 18: ...t in clean and easily legible condition Damaged or illegible warning labels must be replaced immediately Always observe all warning labels on the complete Microscope System 2 4 1 Warning Labels Approp...

Страница 19: ...ZEISS 2 Safety 2 4 Warning Labels and Lights Rear Side of Microscope 6 7 Rear Side of Plinth 8 9 10 11 13 12 CEE Connector 14 Instruction Manual ZEISS SIGMA series en US Rev 7 352102 9344 006 19...

Страница 20: ...he cham ber door before you move the stage Reorder no 347800 0033 000 02en 4 At the front of the chamber door Risk of damage CAUTION 347800 0033 000 04en The FESEM or specimen could be damaged if spec...

Страница 21: ...ed within the EVO SIGMA instrument The acceleration voltage is limited to 30 kV Dose rates around the microscope are less than the maximum permissible values CAUTION CAUTION X rays are produced within...

Страница 22: ...n the grids of the electron optical column Only authorized service staff are allowed to ser vice the equipment Disconnect power and let surfaces cool before opening Reorder no 347800 003 200 Position...

Страница 23: ...ive cover panels Operation of the microscope is only allowed with attached protective cover panels 2 5 2 Main Disconnect Device To disconnect the microscope with all its components from the mains supp...

Страница 24: ...ker The circuit breaker does not completely isolate the plinth from the mains power This can only be done using the Main Disconnect Device 2 5 4 Emergency Off EMO Option External The Emergency Off Cir...

Страница 25: ...n to keep it from being switched on e g during repair and maintenance work The Main Switch is located at the front of the EMO Circuit The Main Switch of the external EMO box guarantees an ampere inter...

Страница 26: ...computer are not properly closed Any unsaved changes to files are lost The Emergency Off function ensures that all power to the microscope is safely cut off The Emergency Off is not appropriate for s...

Страница 27: ...ck rod or the gate valve 2 5 7 Energy Isolating Devices At the site of installation the electrical power connection and the fluid connections must be equipped with energy isolating devices As energy i...

Страница 28: ...n fully read and understood Also refer to manuals of accessories if applicable Especially the chapters Installation and Commissioning and First Operating Steps are important 3 1 System Overview Main C...

Страница 29: ...Right hand tilt Sigma 300 Further options Additional chamberscope stubscope and external navigation camera Column maintenance kit O ring kit Airlock for quick specimen transfer without breaking the s...

Страница 30: ...cuate the specimen chamber 7 The vacuum in the specimen chamber is measured by a Penning gauge 8 The detected vac uum values are displayed as System vacuum in the SmartSEM user interface As long as th...

Страница 31: ...voltage is turned on in this mode 3 2 2 2 Variable Pressure Mode Purpose The variable pressure VP mode enables you to use the scanning electron microscope to image specimens that are non conducting s...

Страница 32: ...ely compensated allowing easy imaging of the specimen 3 2 3 Electron Optical Column Gemini 1 Purpose The Gemini 1 column is the part of the microscope where electrons are emitted accelerated de flecte...

Страница 33: ...tage UB liner voltage of 8 kV is applied to the beam booster in addition to the acceleration voltage so that a high beam energy is maintained throughout the entire col umn The function of the beam boo...

Страница 34: ...orma tion refer to Principle of Signal Detection 34 3 2 4 Gun Modes The microscope can operate in different gun modes Imaging Analytic Imaging Gun Mode In Imaging gun mode the temperature of the Schot...

Страница 35: ...nd specimen 1 Primary electrons 2 Auger electrons 3 Secondary electrons 4 Backscattered electrons 5 Characteristic X rays 6 Continuum X rays 7 Fluorescent X rays Primary Electrons Primary Electrons PE...

Страница 36: ...Fig 15 Backscattered electron coefficient against atomic number BSE detectors are used to display the materials contrast because the backscatter coefficient is de pendent on the mean atomic number of...

Страница 37: ...l contrast YAG BSD Detector 65 BSE Compositional contrast Electron backscatter diffrac tion EBSD detector BSE camera Metallurgy geology and electronics Kikuchi patterns crystallo graphic orientation a...

Страница 38: ...d up to an acceleration voltage of 20 kV by an additional beam booster 3 voltage of 8 kV at the liner tube To ensure that the electrons reach the specimen surface 7 with the energy set as accel eratio...

Страница 39: ...factors tat affects the signal to noise ratio and therefore the efficiency of the InLens SE detector For different imaging applications the working distance needs to be selected depending on the geome...

Страница 40: ...s SE detector Fig 18 Effect on electrostatic field by the BSE detector 3 2 5 3 2 Benefits of the InLens SE Detector The main benefit of the InLens SE detector is its high detection efficiency particul...

Страница 41: ...pecimen and enable good imaging of surface structures and contaminations At higher acceleration voltages the penetration depth of the primary electrons increases More in formation stems from the bulk...

Страница 42: ...tration depth Charging Effects Another reason to use low acceleration voltages is to minimize and compensate the local charg ing on the surface of the specimen If electrons hit a non conducting or a p...

Страница 43: ...V Fig 26 Comparison of topographic contrast of an integrated circuit InLens SE detector left Good imaging of sur face structures low topographic contrast SE detector right Good topographic imaging Acc...

Страница 44: ...to 20 m Limitation of the probe current for the compensation of charges or for the analysis of beam sensitive specimens 60 m and 120 m Only recommended for analytical purposes Specimen tilt Avoid lar...

Страница 45: ...surface properties and topography Fig 28 Comparison of SE detector images using positive and negative collector bias voltage SE detector using 300 V collector bias Good display of surface structures...

Страница 46: ...objective lens itself This means they cannot be detected by the SE detector Depending on the specimen material and on the specimen geometry a minimum working dis tance of approximately 4 mm should be...

Страница 47: ...ntrast is very poor left WD 9 mm using BSE detector Clear image showing good material contrast right In the previous figure the SE image taken at 5 mm working distance shows relatively poor mate rial...

Страница 48: ...Acceleration voltage 0 02 kV to 30 kV In principle suitable for the entire high voltage range 1 kV to 5 kV Low voltage applications for the compensation of charges and for surface sensitive imaging 5...

Страница 49: ...d to the MP Port 1 1 2 3 4 5 Fig 34 Schematics of the VPSE detector 1 Preamplifier 2 Photomultiplier 3 Objective lens 4 Light guide with collector electrode 5 Specimen Function The collector electrode...

Страница 50: ...Use fast scan speeds and increase the number of frames N Collector Bias The collector bias corresponds to the voltage that is applied to the VPSE collector The collector bias accelerates the secondar...

Страница 51: ...ard application for VPSE G4 detector Working distance 6 mm to 8 mm For low voltage applications 3 kV to 7 kV 8 mm to 15 mm For standard applications 7 kV to 25 kV Aperture 30 m The standard aperture i...

Страница 52: ...ons as well as cations The additional electrons also accelerate towards the detector and collide with further gas molecules which are ionized The result is a charge cascade that amplifies the original...

Страница 53: ...f a diode detector is selected 3 2 6 Specimen Stage Sigma 300 WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal...

Страница 54: ...ng for precise fitting 1 Specimen holder 2 Specimen stage Function The stage can be operated using the dual joystick or using the SmartSEM software Axis Description Movement X X axis Movement towards...

Страница 55: ...ecimen stage Fingers can be trapped by the moving specimen stage 4 Always close the chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g twee...

Страница 56: ...men is tilted at a certain work ing distance 3 3 Optional Components and Accessories 3 3 1 Optional Detectors 3 3 1 1 InLens Duo Detector Purpose The InLens Duo detector 1 allows imaging and mixing of...

Страница 57: ...fferences in the speci men There are different types of detectors for backscattered electrons Most of these detectors use semiconductor diodes for signal detection The following semiconductor detector...

Страница 58: ...Risk of malfunction The diode segments are sensitive to the light that is used for illumination in TV mode infrared and white When you use a diode detector always make sure that the TV illumination i...

Страница 59: ...backscattered electrons hit the detector and most electrons pass through the hole without contributing to the signal The optimum solid angle for detection of the backscattered electrons exists only i...

Страница 60: ...60 m Higher probe currents frequently improve the contrast 120 m Often only recommended for analytical applications Specimen tilt Avoid large angles of tilt if possible Operation mode Use of the BSE d...

Страница 61: ...hese semiconductor detectors have a relatively small bandwidth and a high capacitance rela tively long discharge time and therefore a reduced scan rate is recommended when using them The SE detector c...

Страница 62: ...ccessories ZEISS Fig 51 Compositional contrast image left and Shadow mode image right acquired using a BSD Fig 52 Compositional contrast image left and Shadow mode image right acquired using a BSD 62...

Страница 63: ...ICE Motorized specimen stage Risk of damaging the detector when operating the motorized specimen stage 4 Retract the detector head completely after you have finished the work with the detector Info Ri...

Страница 64: ...The emission of backscattered electrons from a specimen is related to the atomic number of the involved material Elements with high atomic numbers generate more backscattered electrons i e the backsca...

Страница 65: ...type detector the YAG BSD detec tor does not have segments with changeable polarity and you can only use this detector for com position imaging In comparison to segment based BSD detectors the YAG BS...

Страница 66: ...r quadrants for the dark field DF and one diode for the bright field BF imag ing The cone angles of the BF and DF signals depend on the specimen as well as the illumination aperture The center hole se...

Страница 67: ...ens 4 Light guide with collector electrode 5 Specimen Function The prerequisite for using this detector is that the specimen emits light when interacting with the primary electron beam Differences in...

Страница 68: ...Y axes and the stage rotation by turning Function All axes are deflection compensated When the joystick is moved only slightly the respective axis moves slowly Larger movements of the joystick result...

Страница 69: ...the beam roundness by changing the stigmation deflectors 2 Aperture X Aperture Y Adjusts the mid column shift and tilt deflectors for aligning the beam along the column axis 3 Scan Rotate Rotates the...

Страница 70: ...observed 8 Freeze Stops the scan and grabs one complete frame at the current imaging conditions 9 Exchange Resume Exchange Starts the pre defined macro for specimen exchange with the airlock Resume St...

Страница 71: ...layout of the user interface 1 Title Bar Displays the name of the user interface and the logged on user 2 Menu Bar Enables you to access to SmartSEM features via sub menus 3 AVI Toolbar Contains the...

Страница 72: ...ecipe management 3 4 2 Graphical Control Elements The following graphical control elements are used in the SmartSEM GUI Screenshot Control Element Function Tab Provides a group of graphical control el...

Страница 73: ...ools Administrator User Access Level Description Novice Only the items assigned to the novice category are accessible These include most frequently used parameters Expert Items assigned to the novice...

Страница 74: ...f the SmartSEM Program Suite is to access all necessary microscopy parame ters and software features to capture SEM data and optimize image acquisition Access Windows start menu SmartSEM Program Descr...

Страница 75: ...libration Wizard Service activities for ZEISS service representatives only Gun Monitor Enables you to monitor important parameters of the microscope GUN Service Service activities for ZEISS service re...

Страница 76: ...on requirements are to be observed and adhered to After installation or retrofitting thor oughly check that the Microscope System is in a safe operational state making sure in particular that all prot...

Страница 77: ...These safety warnings have to be obeyed at any time by every person in the same room as the microscope WARNING Radiation hazard due to X rays X rays are generated inside the microscope during operati...

Страница 78: ...rgizing the Microscope Before energizing the microscope make sure that the following safety warnings have been read and fully understood by each person who is in the same room as the microscope at any...

Страница 79: ...in or as long as the Main Switch of the EMO Circuit is in the ON position To completely cut off the microscope from any mains power 4 with installed EMO Circuit set the Main Switch to the OFF positio...

Страница 80: ...the EMO button to release it 5 Turn the Main switch counter clockwise to the Reset position and then back via OFF to the ON position 6 Press the green Start button 5 2 2 Starting the Microscope Info I...

Страница 81: ...tton lights up green permanently 5 3 Starting the Software Procedure 1 Power up the computer and log in 2 Start the SmartSEM user interface via the ZEISS SmartSEM icon on the desktop Alternatively sel...

Страница 82: ...n table entry F4 SHIFT Exit from Magnification Table mode F5 F5 SHIFT F6 F6 SHIFT F7 F7 SHIFT F8 F8 SHIFT User defined macros F9 Keys help displays this information F11 F11 SHIFT User defined macros F...

Страница 83: ...CTRL T Calls Text Annotation CTRL V Displays the Vacuum status information Keypad Faster Scan Keypad Slower Scan ARROW Keys Refer to Use of ARROW Keys Image Buffer keys Refer to Image Buffer SHIFT an...

Страница 84: ...esentatives before they perform any work on the microscope WARNING Aggressive or toxic chemicals Aggressive or toxic chemicals can cause chemical burns 4 When handling aggressive or toxic chemicals we...

Страница 85: ...o insert the stub into the specimen holder use tweezers 3 To fix the stub to the specimen holder tighten the location screw with the hex key 4 Note down which fix position is occupied by the specimen...

Страница 86: ...tage 4 Always close the chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g tweezers instead of your fingers Procedure 1 In the toolbar clic...

Страница 87: ...with gaseous nitrogen 5 4 2 4 Mounting the Specimen Holder WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing...

Страница 88: ...vacuum deterioration or prolonged pumping times 4 Always wear lint free gloves when touching the specimen specimen holder or stage Procedure 1 Carefully open the chamber door 2 If a specimen holder i...

Страница 89: ...ist and Stage Topview from the lower drop down list INFO To open the Stage Navigation Bar navigate to View Toolbars and activate Stage Navigation Bar for Widescreen users Alternatively you can access...

Страница 90: ...s within this chapter 2 In the SEM Controls panel select the Vacuum tab 3 Verify that the EHT Vac ready readout is EHT Vac ready Yes If not the correct vacuum is not achieved Check if the Pump procedu...

Страница 91: ...an Image Info The following procedure describes the best way to quickly obtain an image without the con trol panel You can also use the control panel to adjust aperture alignment magnification fo cus...

Страница 92: ...the mouse within the Image Area to adjust the magnification to 500 x 3 Hold down the mouse wheel and drag the mouse within the Image Area to adjust the working distance and focus the image 5 4 6 4 Se...

Страница 93: ...nd brightness contrast The procedure consists of the following steps Adjusting the Magnification 93 Moving the Field of View at High Magnifications 93 Limiting the Scan Field 94 Aligning the Aperture...

Страница 94: ...image in the reduced raster 5 4 7 4 Aligning the Aperture Info Alternatively to aligning the aperture manually use the Auto Wobble function via toolbar icon Procedure 1 In the SEM Controls panel sele...

Страница 95: ...rrecting Astigmatism Procedure 1 Ensure that the Reduced Raster function is active 2 Select a detail e g a mark or an edge on the specimen surface Ensure that the selected detail is in the raster You...

Страница 96: ...er 7 Enter the filename in the Filename input field 8 Click Save file name tif 9 To continue imaging click Unfreeze in the Scanning tab 5 5 Modifying Gun Parameters 5 5 1 Selecting the Gun Mode The mi...

Страница 97: ...Faraday cup consists of a strongly absorbing material with a cavity covered by a small aperture If the beam is focused in this cavity no secondary elec trons and no backscattered electrons leave the F...

Страница 98: ...alignment of the electron optical column OptiProbe has to be calibrated Prerequisite Requires the licenses OPTIPROBE and HIGH VOLTAGE Particular hardware and the specimen current amplifier are install...

Страница 99: ...adout The Extractor V Target window is displayed 3 Enter a higher value 4 Click OK After you change the extractor voltage calibrate the probe current refer to Measuring the Probe Current 97 5 6 Findin...

Страница 100: ...kV a WD of exactly 0 is not possible Info Avoid strong specimen tilting for the InLens SE detector Procedure 1 In the SEM Controls panel select the Detectors tab 2 From the Signal A drop down list se...

Страница 101: ...s SE detector refer to Setting up the InLens SE Detector 100 Info Short working distances are preferable for good detection efficiency Avoid strong specimen tilting for the InLens Duo detector Procedu...

Страница 102: ...contrast 5 kV 30 kV min 6 mm Procedure 1 In the SEM Controls panel select the Detectors tab 2 From the Signal A drop down list select SE2 3 Adjust the EHT working distance WD and collector voltage ac...

Страница 103: ...VPSE bias according to the suggestions in the table in order to optimize the image 5 6 6 Setting up the C2D Detector Fig 68 C2D image of radiolaria Procedure 1 In the SEM Controls panel select the Det...

Страница 104: ...angular resolved BSE images Use high or very high detector gain for low accelerating voltage and or low beam current The EHT should be bigger than 2 kV to achieve a significant detection efficiency Pr...

Страница 105: ...it is recommended to use scan speed 6 or higher slower especially at small magnifications The lower the gain is the faster is the detector 5 6 8 Setting up the HDAsB Detector The HDAsB detector is opt...

Страница 106: ...trol dialog displays the four quadrants outputs 5 Click a quadrant symbol to toggle its status between on white inverted black and off gray 6 To confirm the settings click Apply 7 To choose the respec...

Страница 107: ...n 4 In the Detectors tab of the SEM Controls panel select the respective detector from the Signal A drop down list 5 Open the Panel Configuration Bar 6 Double click BSD Control to open the BSD Control...

Страница 108: ...Procedure 1 Insert the detector If there is any resistance make sure the silver knob is untightened 2 In the SEM Controls panel select the Detectors tab 3 From the Signal A drop down list select YAG...

Страница 109: ...ns SE detector the InLensDuo detector and the SE detector cannot be used Mode Booster Chamber Pressure High Vacuum HV On 10 Pa Variable Pressure VP Off 2 133 Pa Tab 4 VP configuration 5 7 1 Changing t...

Страница 110: ...akes approximately 20 s 5 8 Working with Optional Accessories 5 8 1 Using the Optional Airlock 5 8 1 1 Unloading the Specimen Using an Airlock You can unload the specimen either manually or with pre d...

Страница 111: ...he specimen chamber and is to be exchanged for another specimen Procedure 1 Switch off the EHT 2 To open the Stage Navigation Bar navigate to View Toolbars and activate Stage Navigation Bar for Widesc...

Страница 112: ...k of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing nitrogen may cause unconsciousness 4 During specimen exchange keep the chamber door open as sho...

Страница 113: ...s vented with nitrogen 5 Take hold of the airlock handle and open the airlock door 6 To exchange the whole specimen holder Turn the knob counter clockwise and detach the specimen holder from the airlo...

Страница 114: ...o the Airlock WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing nitrogen may cause unconsciousness 4 During...

Страница 115: ...tion section of the Stage Navigation Bar 4 Close the airlock door 5 On the control panel press Transfer to change to Transfer mode Alternatively click Transfer in the Airlock panel The airlock is evac...

Страница 116: ...automatically performs the following steps The gate valve is closed The column chamber valve is opened INFO The airlock macros can be modified according to your individual requirements Contact your lo...

Страница 117: ...panel The gate valve is closed The airlock chamber is vented with nitrogen 2 Click Open Column Chamber Valve The column chamber valve is opened 3 Switch on the EHT Refer to Switching on the EHT 90 9 Y...

Страница 118: ...r Log NOTICE Gases Unstable pressure or unwanted reactions between the plasma and gases injected into the chamber can damage the specimen or the vacuum system If a gas injection system or the charge c...

Страница 119: ...ED is active This indicates that the plasma cleaning process is complete INFO If you wish to abort the cleaning cycle while it is still running click Stop cleaning The chamber is pumped 8 Wait until V...

Страница 120: ...ed recipes 6 If a plasma cleaner with purge option is installed and if nitrogen purge cycles are necessary activate the Purge checkbox This adds additional values that can be edited 7 If required acti...

Страница 121: ...nel Configuration Bar select Plasma Cleaning The Plasma Cleaning panel is displayed 2 To select a date for your cleaning schedule click the Calendar icon 3 In the input field on the left side of the C...

Страница 122: ...ight is analyzed The stage position and working distance of the SEM and the Raman spectroscopic microscope are not identical Fig 73 SEM and Raman working distance Prerequisite SmartSEM is started Proc...

Страница 123: ...tically The image of the USB TV camera is automati cally displayed to let you see the movement towards the Raman objective and the Raman working distance INFO The speed of the dual joystick de pends o...

Страница 124: ...he electron microscope overlay the Raman image to the SEM image Import the SEM image via File Import Import SEM Image 12 In the Project Manager window drag the light microscope image and drop it on th...

Страница 125: ...n Click and Move checkbox 15 Click on the light microscope image and accurately align it with the SEM image The Raman microscope is correlated with the electron microscope 16 To extract a bitmap image...

Страница 126: ...Controls panel This can help to prevent oil vapors from penetrating into the specimen chamber during the period of storage NOTICE Schottky field emitter If the Schottky field emitter is switched on an...

Страница 127: ...enu Bar select File Log Off A system message is displayed 2 Click Yes 3 Close the EM Server A system message is displayed 4 Click Yes INFO The EM server remains active 5 9 2 2 Exiting the SmartSEM Use...

Страница 128: ...n Standby mode refer to Finishing the Work Session 126 or in OFF mode Procedure 1 If the microscope is not yet in OFF mode press the Off button at the front of the plinth When all subsystems are fully...

Страница 129: ...5 s before touching the pins of the mains plug NOTICE Components in the high voltage circuitry When the microscope especially the gun is fully on an abrupt shutdown of all electrical sup plies may dam...

Страница 130: ...ance Schedule To maintain best possible performance of the Microscope System it is essential to perform pre ventive maintenance on a regular basis The recommended intervals depend on the total uptime...

Страница 131: ...For maintenance of the pre vacuum pump refer to the instruction manual of the pump provided by the pump manufacturer You can find this documentation in the document folder of your microscope 6 4 Care...

Страница 132: ...Avoid contact with skin 4 Do not breathe vapor In case you have to clean the microscope always use a lint free cloth In case you need a cleaning liquid only isopropanol on a lint free cloth may be us...

Страница 133: ...there is no change in total emission current Field emission gun has been damaged due to arcing Contact your local ZEISS ser vice representative to have the field emission gun replaced InLens image is...

Страница 134: ...ballast at the pre vacuum pump Vac ready OK is dis played abnormally fast Penning gauge has not been identified correctly Restart the microscope If this does not solve the prob lem contact your local...

Страница 135: ...Procedure 1 From the Windows start menu select SmartSEM SmartSEM Administrator The SmartSEM Administrator Log on window is displayed 2 Enter user name and password 3 To confirm click OK The SmartSEM A...

Страница 136: ...mera If the CCD camera is installed at the back enter 180 If the CCD camera is installed at the front enter 0 If the CCD camera is installed at the side enter 90 180 0 90 chamber door 7 1 4 Resetting...

Страница 137: ...e symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bility fatigue leave the room immediately and inform t...

Страница 138: ...un vacuum deteriorates with time It is possible to perform a bake out operation as a regular maintenance procedure to restore the vacuum The procedure consists of the following steps Switching off the...

Страница 139: ...the Supervisor privilege and the user level Service Only advanced operators are allowed to perform the bakeout procedure Procedure 1 In the Panel Configuration Bar double click Bakeout The Bakeout di...

Страница 140: ...e is performed which takes about fifteen minutes When the calibration procedure is finished a message is displayed 8 To finish the dialog click Yes Now OptiProbe is ready to be used 7 3 Power Circuit...

Страница 141: ...After contact with the skin wash immediately with plenty of water and soap CAUTION Isopropanol Isopropanol is highly flammable and irritating to the eyes Vapors may cause drowsiness and dizziness 4 We...

Страница 142: ...1 Backup the database to the server or to other storage 2 Delete the temporary files 3 Check for adequate free space on the hard drives 4 Backup the log file EMServer log 5 Erase the original log fil...

Страница 143: ...rer WARNING Biological hazards Biological substances may pose a threat to the health of humans and other living organisms 4 Keep a logbook of the biological substances loaded into the microscope and s...

Страница 144: ...ufficiently vented 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bility f...

Страница 145: ...sed for shipping or transport Fork lift and a hand pallet truck For on site transport and unloading a fork lift and a hand pallet truck are necessary Ensure all hallways and corners are wide enough to...

Страница 146: ...ctive 2012 19 EU ZEISS has implemented a system for the return and recy cling of devices in member states of the European Union that ensures suitable reuse according to the EU Directives mentioned The...

Страница 147: ...using the supplied mains cable The protective earth connection must not be im paired by the use of extension cables Info Your ZEISS Sales Service Partner will provide you with the detailed installati...

Страница 148: ...compensation Automatic correction of apparent image rotation with changes in working distance Beam shift For precise adjustment of image position at high magnifications Maximum scan speed 50 ns pixel...

Страница 149: ...s included in base tool configuration various specimen holders available as option Plasma cleaner optional Integrated plasma cleaner Chamber mounted plasma cleaner for removal of hydrocarbon contamina...

Страница 150: ...hanneling contrast imaging of metals and min erals Four quadrant solid state BSD diode each segment 10 mm in tegrated in the Gemini objective lens for the detection of angular se lective backscattered...

Страница 151: ...ur ZEISS Sales Service Partner will provide you with the detailed installation requirements Weight and Sizes Main Components Length mm Width mm Height mm Weight kg Plinth column 822 960 1757 636 Table...

Страница 152: ...n working distance Beam shift For precise adjustment of image position at high magnifications Maximum scan speed 50 ns pixel Image framestore 4 3 format with 16 bit dynamic range 1024 768 pixels 2048...

Страница 153: ...of hydrocarbon contamination from both specimen and chamber integrated software control for user defined cleaning cycles without user interaction after starting the cleaning process Vacuum Modes High...

Страница 154: ...ctable multi mode solid state Backscattered Elec tron Detector BSD enables materials contrast crystal orientation and topographic imaging diode with 4 sectors and one additional segment Provides 4 par...

Страница 155: ...arameter Requirement Installation site Exclusively inside buildings Recommended room size Min 3 6 m 5 0 m 2 3 m Service area Min 0 8 m at each side Entrance Min 0 8 m wide Hallways Min 1 0 m wide Corn...

Страница 156: ...ower consump tion Max 3 kVA dependent on accessories Circuit breaker at house installation 16 A Type C Ampere interrupt ing capacity AIC 1500 A rms without external EMO box 10000 A rms with external E...

Страница 157: ...min for ventilation of specimen chamber with chamber door open Pressure 0 2 3 3 bar Quality 4 6 with nitrogen content 99 996 Connection hose 4 mm inside diameter 10 m are delivered with the microscope...

Страница 158: ...oximity Vibrations Horizontal vibrations in x y direction Up to 10 Hz less than 0 04 mm s 10 20 Hz less than 0 17 mm s 20 70 Hz less than 0 30 mm s Above 70 Hz less than 20 mm s Vertical vibrations in...

Страница 159: ...per A Mains power supply 208 230 V max 16 A 2 Pre vacuum pump Equipotential bonding bar afety earth 3 Plinth and column Vacuum exhaust 4 Computer workplace Chilled water supply Dry compressed air Dry...

Страница 160: ...9 Technical Data and Conformity 9 3 Installation Requirements ZEISS 9 3 2 System Layout 160 Instruction Manual ZEISS SIGMA series en US Rev 7 352102 9344 006...

Страница 161: ...requirements Part 1 General requirements EN ISO 12100 2010 Safety of machinery General principles for design Risk assessment and risk reduction EN ISO 13849 1 2015 Safety of machinery Safety related p...

Страница 162: ...resentative for information regarding how to order spare parts and consumables 4 Unless otherwise authorized by ZEISS all spare parts and consumables must be installed by a ZEISS service representativ...

Страница 163: ...e beam booster so that a high beam energy is maintained throughout the entire column The beam booster technique has two main advan tages It minimizes beam widening that may occur due to stochastic ele...

Страница 164: ...ve lens backwards and forward through the focus on the specimen plane When the aperture is misaligned a lateral shift is observed GIS Gas Injection System GUI Graphical User Interface H Height HD High...

Страница 165: ...lectron Microscope SEMI Semiconductor Equipment and Materials International SEMI is a industry associa tion comprising companies involved in the electronics design and manufacturing supply chain Smart...

Страница 166: ...logy enterprise operating in the fields of optics and optoelectronics Further in formation about ZEISS can be found at www zeiss com ZEISS Sales Service Partner The Sales Service Partner is generally...

Страница 167: ...ables 130 Contamination 146 Control panel 69 Cover panel protective 23 D Decontamination 146 Detector 36 99 aBSD1 LH 63 104 aSTEM 141 BSD 57 60 107 BSD1 VP 141 BSD4 141 C2D 52 103 CL 67 108 Everhart T...

Страница 168: ...n 79 81 N Nitrogen 134 O ON OFF switch 24 Online help 81 Operation 78 Operator Basic 11 Training 11 Optimizing the image 93 OptiProbe 98 140 P Penning gauge 134 Performance data 147 151 Plasma cleaner...

Страница 169: ...tiching to standby 126 System vacuum 134 T Temperature 136 Tool 162 Touch alarm reset 136 Transfer position 111 112 Transmitted electron 36 Troubleshooting 133 Type plate 22 U User access level 73 Use...

Страница 170: ...rl Zeiss Promenade 10 07745 Jena Germany phone 49 1803 33 63 34 fax 49 3641 64 3439 info microscopy de zeiss com www zeiss com microscopy Instruction Manual ZEISS SIGMA series en US Rev 7 Modification...

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