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Condenser
The electrostatic condenser collimates and focuses the ion beam depending on the operating
mode.
Probe currents
After passing the condenser, the beam current is defined by a set of software-controlled mechan-
ical apertures. By using the different apertures in combination with the different condenser set-
tings, the probe current can be continuously adjusted in the range between 1 pA and 50 nA.
Among other things, the probe current depends on aperture size and condenser settings.
The objective lens is designed as an electrostatic einzel-lens system. It focuses the beam onto
the specimen surface.
Содержание AURIGA Compact Crossbeam
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