PK=aÉëÅêáéíáçå
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí
=
ÉåMP
=OT=çÑ=NSQ
tçêâëí~íáçå
3.2.1. Gas injection system (GIS) upgrade
A gas injection system allows the injection of one or more process gases to the specimen surface.
3.2.1.1. Multi GIS
The Multi GIS allows you to inject up to five different precursor gases.
For details refer to the respective Instruction Manual.
3.2.1.2. Single GIS
The one-channel GIS allows you to inject one precursor gas.
For details refer to the respective Instruction Manual.
Содержание AURIGA Compact Crossbeam
Страница 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Страница 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Страница 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Страница 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Страница 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Страница 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...