Zeiss AURIGA Compact Crossbeam, Инструкция по эксплуатации

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3.6. Installation requirements
Location requirements
Installation site Exclusively inside buildings
Room size Min 3.5 m x 5.0 m x 2.3 m (W x D x H)
Service area Min 1 m at each side
Installation category II
Exhaust line An exhaust line is required to remove the
wate gas of the pre-vacuum pump and to
transmit it to the outside.
Electrical supplies
Nominal AC voltage 208 V - 230 V (±10%), 1/N (L2) / PE
Protection class I
Nominal frequency 50 - 60 Hz
Power consumption Max. 3.5 kVA, dependent on upgrade stage
and installed optional accessories
Current input Max. 16 A
Circuit breaker 25 A, switch off behaviour K on installation site
A special emergency-off circuit is available (part no. 340002-0167).
The EMO box is mandatory for the upgrade of FIB and/or GIS.
The EMO box should be mounted close to the system. Wiring that runs
outside the workstation should be laid and protected in appropriate cable
ducts or trays.
Moreover, it is recommended to protect the complete room by installing a
power switch next to the door of the room.
Ampere interrupting
capacity AIC With EMO box At least 10000 A rms
Protective ground The workstation must be connected via a separate protective ground.
An exclusive grounding connection to earth must be provided, i. e. the
grounding terminal must not be common to other electrical equipment.
A grounding wire AWG10 (5 m long) is delivered with the workstation.
Cross section
> 4 mm
2
Ground resistance
< 0.1
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