Zeiss AURIGA Compact Crossbeam, Инструкция по эксплуатации

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6.6.5. Setting detection parameters
6.6.5.1. Using the SESI detector (optional)
The SESI detector allows the acquisition of FIB secondary ion images and electron images.
The following table should serve as a help to find the required settings for your application.
Preconditions:
•
Gun and EHT are on
•
Suitable specimen is located
Procedure:
1 Select an imaging mode, e.g. FIB mode SEM .
2 Go to the Detectors tab of the SEM Control
panel.
3 Select SESI from the drop-down menu.
The SESI detector is operated in SE mode .
Operating
mode Detected
signals
FIB mode EHT
Typical
WD
Detector settings
SE mode Secondary
electrons SEM 100 V to 30
kV max. 5 mm Collector voltage: 0 V to + 1500 V
Best detection: +300 V to + 400 V
FIB 1 kV to 30 kV coincidence point Collector voltage: 0 V to + 1500 V
Best detection: +300 V to + 400 V
Ion mode Secondary
ions FIB 1 kV to 30 kV coincidence point Collector voltage: - 5 kV to 0 kV
Best detection: around - 4 kV