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CAUTION
Risk of injury from hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout,
particularly after a long bakeout cycle.
Do not touch any parts of the cover panel or place any combustible objects on the grid of
the electron optical column.
IMPORTANT
You may switch to STANDBY mode while the bakeout procedure is running.
Before you do so, ensure that the ’PARTIAL VENT ON STANDY’ checkbox is UNTICKED in
the SEM Control panel.
10 To start the bakeout procedure, click on
Bake-
out Start
.
After having finished the bakeout procedure:
1
Remove the pieces of aluminium foil.
CAUTION
Danger of misaligning the gun head
Ensure not to apply any lateral force when reconnecting the high voltage plug.
2
Reconnect the high voltage plug.
Note the pin (
1
) at the gun head.
It fits into the bore hole at the high voltage
plug in order to ensure correct orientation.
3
Tighten the screws.
4
Switch on the gun to continue working with
the workstation.
1
Содержание AURIGA Compact Crossbeam
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