QS=çÑ=NSQ
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí=ÉåMP
PK=aÉëÅêáéíáçå
péÉÅáÑáÅ~íáçå
3.5.2. FIB column
IMPORTANT
For more details refer to the document Product Specification AURIGA
®
Compact.
Performance
Resolution
< 5 nm at 30 kV
Acceleration voltage
1 - 30 kV
< 5 kV as an option
Probe current
1 pA - 50 nA
Magnification range
300 x - 500,000 x
Ion optics
Ion source
Gallium liquid metal ion
source
Lenses
Two electrostatic lenses
Stigmator
Eight pole electrostatic
Apertures
7 apertures, motorized
Beam Shift
±7 µm
Содержание AURIGA Compact Crossbeam
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