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6.6.6.2. Adjusting a low probe current (pA)
Procedure:
1
Load the Faraday cup.
2
Go to the coincidence point at 54°.
3
Ensure that the emission of the ion beam is stable.
4
Go to
FIB Control/Align
and select a probe cur-
rent.
5
Start measuring the specimen current by
using the Specimen Current Monitor (
Panel
Configuration Bar/Specimen Current
Monitor
).
6
Activate the
SCM On
and the
Spot
checkbox.
7
Go to
FIB Control/Align
.
8
Activate the
Modify Condenser
checkbox.
9
Adjust the
FIB Condenser
until the desired
probe current is measured by the Specimen
Current Monitor.
The condenser value is automatically adopted
to the
FIB Probe Table
.
10 Focus the specimen surface: Use
Focus
and
Stigmation
.
Содержание AURIGA Compact Crossbeam
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