SK=léÉê~íáçå
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí
=
ÉåMP
=NMV=çÑ=NSQ
`êçëë_É~ã
®
çéÉê~íáçå
The deposition process ends automatically.
6
Move the GIS micro stage to the park position:
a
Go to the
GIS
tab.
b
Click
Parked
.
The GIS micro stage is driven to the safe park
position.
IMPORTANT
If you activate the GIS Auto Park checkbox in the Options tab before starting the deposition
(step 5), the GIS micro stage is automatically driven to the safe park position.
Содержание AURIGA Compact Crossbeam
Страница 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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