NPS=çÑ=NSQ
fåëíêìÅíáçå=j~åì~ä=^ìêáÖ~=`çãé~Åí=ÉåMP
TK=j~áåíÉå~åÅÉ=~åÇ=êÉé~áê
`Ü~åÖÉ=çÑ=Åçåëìã~ÄäÉë=~åÇ=ÅÜÉãáÅ~äë
7.3. Change of consumables and chemicals
The change of consumables and chemicals have to be done by a Carl Zeiss servce engineer in
mandatory intervals.
The times scheduled are designed for the maximum equipment performance level:
1
There is no warranty on cathodes; cathode manufacturers do not guarantee any lifetime.
Interval
Component/Part
Every 6000 h
1
(filament on)
Gun (cathode)
1
As required or yearly
(and after cathode exchange)
Standard multihole aperture
Anode aperture
Extractor aperture
Anode aluminium seal
Copper seal at gun head
Yearly or as required
Pre-vacuum pump
Yearly
SE2 detector
In-lens detector
InlensDuo detector
As required
Ion source
With every ion source replacement
FIB apertures
Upgraded workstation
If used up
Precursors
Table 7.1: Time schedule
Содержание AURIGA Compact Crossbeam
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