Zeiss AURIGA Compact Crossbeam, Инструкция по эксплуатации

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2. Safety
2.1. Intended use
AURIGA
®
Compact is a CrossBeam
®
workstation that allows microscopic examination and mod-
ification of suitable specimens.
The workstation allows you to perform the full range of
FESEM and CrossBeam
®
applications, which are:
•
SEM operation
A focused beam of electrons is scanned across the specimen to generate an image or to
analyse the specimen.
Suitable for the analysis of surface structures and near-surface structures of appropriate spec-
imens.
•
FIB Imaging
A focused beam of ions is scanned across the specimen to generate an image or to analyse
the specimen.
•
Milling
A focused beam of ions locally removes material from the specimen surface.
•
Gas assisted etching with ion beam (requires optional gas injection system)
With the help of a process gas, the focused ion beam cuts into the specimen surface.
•
Gas assisted deposition with ion beam (requires optional gas injection system)
With the help of a process gas, the focused ion beam deposits material onto the specimen
surface.
•
Gas assisted etching with electron beam (requires optional gas injection system)
With the help of a process gas, the electron beam cuts into the specimen surface.
•
Gas assisted deposition with electron beam (requires optional gas injection system)
With the help of a process gas, the electron beam deposits material onto the specimen
surface.
For all of these applications, the specimen has to be located in the evacuated specimen chamber.
IMPORTANT
Depending on the upgrade stage of your workstation, not all of theses features may be
available.
Commercial
use only
The workstation is to be used in a laboratory environment for commercial purposes only.
Using the workstation for any other purpose is not allowed and could be hazardous.