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5.1.2. Adjusting the coincidence point
Check daily, if the Argon Ion Beam System is still within the coincidence point of SEM and FIB.
The coincidence point is where all three beams of the Triple Beam System cross.
Preconditions:
•
Eucentricity has been adjusted as described in the software manual SmartSEM
®
NV.
•
Coincidence point of FIB and SEM has been adjusted as described in the workstation manual
SmartSEM
®
NV
Procedure:
1
Load a Faraday cup.
2
Focus on a detail in SEM.
3
To be able to see the live argon image, select
FIB Mode Argon
from the FIB mode
selection.
4
Check that the same detail is centered in the
argon image.
Содержание Argon Ion Beam System
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