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5.2.3. Checking the argon discharge
1
Check, that
Argon Discharge
is set to
-1000 V (
1
).
2
Check, that 130 µA are displayed under
Argon Discharge I is
(
2
).
If the value is lower:
a
Reduce
Argon Gas Flow
in
0.1 %
steps.
1
2
Содержание Argon Ion Beam System
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