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3.2.1. Fine-polishing
FIB milling
While milling a flow of ions (
1
) released from the
FIB column (
3
) hit the surface of the
TEM lamella (
2
).
Implantation
and
amorphisation
The gallium ion milling causes gallium implanted
and, on crystalline samples, amorphous surface
layers that deteriorate the quality of the TEM
lamella.
Removing
damage layers
These damage layers and the implanted gallium
ions (
6
) can be minimized by fine-polishing with
low-energy argon ions (
5
) from the Argon Ion
Beam System (
4
).
This improves the quality of the TEM lamella.
The visibility of fine details improves.
1
3
2
4
5
6
Содержание Argon Ion Beam System
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