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At most of the times, a small area of the TEM
lamella or cross-section will be shadowed from
the argon beam surrounding sample holder or
trench edges.
The disparity of the exposed and shadowed area
can be used to assess the progress of the
polishing.
16 To polish the back of a TEM lamella, do a
compucentric rotation of the TEM lamella
by 180°.
17 Repeat the polishing.
If it is not necessary to observe the back while
polishing:
a
Adjust a combination of stage rotation
and tilt that results in the negative of the
incidence angle used for the front
polishing. E.g., -10° instead of +10°.
Now, the fine polishing of the TEM lamella is
complete.
Содержание Argon Ion Beam System
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