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3.3. Technical data
Environmental requirements
Pollution degree
2
Installation category
II
Electrical supplies
Nominal AC voltage
AC 100 V 5 A ( 0.5 kVA) ±10%
Nominal frequency
50-60 Hz single phase
Power consumption
-
Ground
100 Ohm or less
Specifications
Ion source
Gaseous Argon
Lenses
Two stage electrostatic lens
Beam deflector
Quadrupole electrostatic type
Acceleration voltage
0.5 - 1.0 kV
Maximum beam
current
>10 nA
Beam energy
0.5 - 1.0 keV
Beam diameter/ spot size
50 - 150 µm, typically 100 µm at 1 kV, 10 nA
Max. beam shift
± 1.5 mm (at WD 29 mm)
Max. scan range
> 3.0 mm (at WD 29 mm)
Ion irradiation angle
0 - 30 °
In situ lift-out
The Argon Ion Beam System is compatible with the in-situ lift-out technique
Control
SmartSEM
®
V05.04 or higher
Fully integrated in the SmartSEM
®
software. The Argon Ion Beam
System is operated via the graphical user interface of SmartSEM
®
.
Содержание Argon Ion Beam System
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