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5.2.2. Checking the argon gas flow
1
Check that Argon Gas Flow is set to
1.5
-
3.0
%.(Usually
2.0
-
2.3
% is optimal).
The beam current decreases at higher or lower
gas flow.
2
Check that the beam current is high enough:
a
Set Argon Energy to 1000 V with the
slider.
b
Load a Faraday cup.
c
Use the specimen current monitor to
measure the beam current.
It should be at 10 nA.
If the beam current is lower:
d
Adjust the argon gas flow with the slider.
IMPORTANT
If the gas flow is set too low or too high, the argon ion beam does not switch on.
Содержание Argon Ion Beam System
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