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8. Abbreviations
EHT
Extra high tension
EM
Electron microscope
FESEM
Field emission scanning electron microscope
FIB
Focused ion beam
HV
High vacuum
PIG
Penning ion generator
SEM
Scanning electron microscope
Si
Silicon
TEM
Transmission electron microscope
V
Voltage
WD
Working distance
XB
CrossBeam
®
Содержание Argon Ion Beam System
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