Zeiss Argon Ion Beam System, Инструкция по эксплуатации

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3.2. Principle of operation
In the Triple Beam System, FIB, SEM and Argon Ion Beam System are arranged in a way that
they
intersect at the same point in the specimen chamber. This point is called coincidence point.
Therefore, all Argon Ion Beam System operations can be monitored in high resolution SEM live
imaging.
The Argon Ion Beam System generates argon ions from argon gas. When passing the column,
the condenser aperture and the lens form a microscopic ion beam.
FIB
Ar+
SEM