Zeiss Argon Ion Beam System, Инструкция по эксплуатации

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1.1. Definition of terms
The following terms are used in this manual:
This instruction manuals relates to the operating software SmartSEM
®
V05.04.
Argon Ion Beam System Focused ion beam system used for fine polishing of TEM lamellas.
Triple Beam System Combination of FIB/SEM and Argon Ion Beam System
SmartSEM
®
Operating software for Carl Zeiss field emission scanning electron
microscopes
Operator A trained person, who is assigned to operate the workstation.
Basic operator:
Person who has been trained to perform fundamental operation
sequences
Specially trained operator :
Electrically skilled person who has been trained to perform basic main-
tenance tasks
User A person or organisation that uses products of Carl Zeiss.
Carl Zeiss service
engineer,
Carl Zeiss service staff Specially trained service expert, either Carl Zeiss staff or
authorised service partner of Carl Zeiss.
FIB Focused ion beam
GEMINI
®
column
Electron optical column
Coincidence point Point where electron beam and ion beam are crossed.