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IMPORTANT
For TEM lamella or cross-section polishing, grazing incidence angles below 10° are used.
For delineation etching of a structure in a cross-section, a much steeper incidence angle,
preferably perpendicular to the cross-section, is required. In order to achieve such an
incidence angle, the TEM lamella may need remounting to a different orientation on the
sample holder after FIB milling of the cross-section.
7
To see the SEM live image, select
FIB Mode SEM
from the drop-down menu.
8
Center the area to be polished e.g., the front side of a TEM lamella, or the FIB cut
cross-section for SEM imaging.
9
Navigate the area to the coincidence point of SEM and FIB. Thus, the area will now also be
centered to the argon image.
IMPORTANT
It is recommended to do the polishing with a small scanning argon beam field, as this
yields a more homogeneous polishing than using a stationary argon beam.
Set the argon beam to scan mode in the Argon Gun panel.
10 To be able to see the live argon image, select
FIB Mode Argon
from the FIB mode
selection.
11 To achieve an optimum homogenity and
effectivity of the scanned area, set the
magnification to 250 -300 x.
Содержание Argon Ion Beam System
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