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9. Declaration of conformity

This is to declare that the product mentioned above fulfils all the relevant provisions of the

•

Directive 2006/95/EC and

•

Directive 2004/108/EC

and is in conformity with the following standards:

•

Standard EN 61010-1

•

Standard EN 61000-6-2

•

Standard EN 55011

Unauthorised modifications of the machinery will cancel this declaration.

CE marking

The CE conformity marking is located on the type plate of the machinery.

Denomination:

Argon Ion Beam System

Model:

Argon Ion Beam System for NVision 40

Manufacturer

SII Nano Technology Inc.
8, Nakase 1-chome, Mihama-ku
Chiba-shi Chiba 261-8507
Japan

Содержание Argon Ion Beam System

Страница 1: ...Instruction Manual Carl Zeiss Microscopy Electron and Ion Beam Microscopy Argon Ion Beam System Optional additional FIB column for NVision 40 Enabling the Nano Age World...

Страница 2: ...al system Violations will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement that such names...

Страница 3: ...tting started 14 5 1 1 Switching on the argon beam 14 5 1 2 Adjusting the coincidence point 16 5 2 Adjusting operational parameters 18 5 2 1 Setting the acceleration voltage 18 5 2 2 Checking the argo...

Страница 4: ...fs f j f _ p MO...

Страница 5: ...iled information regarding the CrossBeam workstation refer to the Instruction Manual of the workstation For detailed information regarding the operating software refer to the Software Manual SmartSEM...

Страница 6: ...R key on the keyboard Type key1 key2 Type key 1 first then type key 2 on the keyboard Type Ctrl Alt Del Simultaneously type CTRL key ALT key and DEL key on the keyboard Click on the High voltage icon...

Страница 7: ...perator A trained person who is assigned to operate the workstation Basic operator Person who has been trained to perform fundamental operation sequences Specially trained operator Electrically skille...

Страница 8: ...rgon ions 2 2 Prevention of accidents and of improper use CAUTION Risk of injury or damage due to improper operation of the option Read the user documentation carefully Do not operate the option until...

Страница 9: ...own selection of the FIB toolbar FIB mode Argon Shows the live image of the argon beam in scan or spot mode Electron beam and focused ion beam are blanked FIB mode Argon SEM While working with the arg...

Страница 10: ...ersect at the same point in the specimen chamber This point is called coincidence point Therefore all Argon Ion Beam System operations can be monitored in high resolution SEM live imaging The Argon Io...

Страница 11: ...n milling causes gallium implanted and on crystalline samples amorphous surface layers that deteriorate the quality of the TEM lamella Removing damage layers These damage layers and the implanted gall...

Страница 12: ...Beam deflector Quadrupole electrostatic type Acceleration voltage 0 5 1 0 kV Maximum beam current 10 nA Beam energy 0 5 1 0 keV Beam diameter spot size 50 150 m typically 100 m at 1 kV 10 nA Max beam...

Страница 13: ...t your local Carl Zeiss service engineer A list of Carl Zeiss locations and authorised service partners can be found at http www zeiss com microscopy 4 Installation The Argon Ion Beam System is either...

Страница 14: ...general information about SmartSEM refer to Software Manual SmartSEM and Software Manual SmartSEM NV 5 1 Getting started 5 1 1 Switching on the argon beam 1 Select Tools Goto Panel 2 Select Argon Gun...

Страница 15: ...EAM ON mode 5 To be able to see the live argon image select FIB Mode Argon from the FIB mode selection SmartSEM switches to the live argon image IMPORTANT The Argon Ion Beam System has the ability to...

Страница 16: ...eam System cross Preconditions Eucentricity has been adjusted as described in the software manual SmartSEM NV Coincidence point of FIB and SEM has been adjusted as described in the workstation manual...

Страница 17: ...RK l f j f _ p MOK NT PO d If this detail is not centered in the argon image a Go to the Argon Gun panel b To center the detail use the Argon Beam Shift Now the coincidence point is adjusted...

Страница 18: ...ation voltage The lower the acceleration voltage the gentler the polishing process will be but the milling rate will also be decreased 1 To regulate the duration and intensity of the milling process a...

Страница 19: ...ower gas flow 2 Check that the beam current is high enough a Set Argon Energy to 1000 V with the slider b Load a Faraday cup c Use the specimen current monitor to measure the beam current It should be...

Страница 20: ...MOK RK l 5 2 3 Checking the argon discharge 1 Check that Argon Discharge is set to 1000 V 1 2 Check that 130 A are displayed under Argon Discharge I is 2 If the value is lower a Reduce Argon Gas Flow...

Страница 21: ...der to achieve the desired argon incidence angle adjust a suitable combination of stage rotation and tilt according to the formulas Polar angle arctan sin R sin 50 cos R cos T sin 2 5 sin T Azimuthal...

Страница 22: ...e SEM from the drop down menu 8 Center the area to be polished e g the front side of a TEM lamella or the FIB cut cross section for SEM imaging 9 Navigate the area to the coincidence point of SEM and...

Страница 23: ...RK l f j f _ p MOK OP PO c qbj 12 Select Tools Goto Panel 13 Select Argon Mill from the menu The Argon Mill panel opens 14 Enter the desired polishing time in Time to Mill...

Страница 24: ...posed to the scanning argon beam for the selected time The remaining polishing time is displayed in Time Left While polishing the TEM lamella you can monitor the progress in the SEM image a Click on G...

Страница 25: ...be used to assess the progress of the polishing 16 To polish the back of a TEM lamella do a compucentric rotation of the TEM lamella by 180 17 Repeat the polishing If it is not necessary to observe t...

Страница 26: ...Switching off the argon beam 1 Go to the Argon Gun panel 2 Click on Standby The imaging mode switches SEM The Argon Ion Beam System switches to STANDBY mode 3 Click on Off Now the beam of the Argon I...

Страница 27: ...neer to hace the argon gas bottle replaced 6 2 Repair CAUTION Risk of property damage due to improper maintenance service or repair The warranty might be voided Strictly follow the instructions given...

Страница 28: ...System and the workstation and to perform work on the electrical system 7 De installation and disposal The Argon Ion Beam System is de installed and disposed of by authorised Carl Zeiss service staff...

Страница 29: ...on EM Electron microscope FESEM Field emission scanning electron microscope FIB Focused ion beam HV High vacuum PIG Penning ion generator SEM Scanning electron microscope Si Silicon TEM Transmission e...

Страница 30: ...with the following standards Standard EN 61010 1 Standard EN 61000 6 2 Standard EN 55011 Unauthorised modifications of the machinery will cancel this declaration CE marking The CE conformity marking i...

Страница 31: ...cup 16 19 FIB mode Argon 9 FIB mode Argon SEM 9 Fine polishing of TEM samples 21 G Gallium implanted surface layer 11 I Installation 13 Instruction 5 Intended use 8 M Maintenance 27 Maintenance and r...

Страница 32: ...dge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microsco...

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