Zeiss Argon Ion Beam System, Инструкция по эксплуатации

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3. Description
3.1. Overview
Fig. 1.1: Triple Beam System
3.1.1. Argon FIB modes
With the Argon Ion Beam System installed, new imaging modes become available in the
drop-down selection of the FIB toolbar.
•
FIB mode Argon
Shows the live image of the argon beam in
scan or spot mode. Electron beam and
focused ion beam are blanked.
•
FIB mode Argon + SEM
While working with the argon beam in scan or
spot mode, this mode allows you to monitor
the progress in the live SEM image.
The focused ion beam is blanked.
1 FIB column 3 GEMINI
®
column (SEM)
2 Argon Ion Beam System
3
1
2