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5.3. Fine polishing of TEM lamellas
Preconditions:
•
Coincidence point has been adjusted as described in section 5.1.2.
Procedure:
1
Load the TEM lamella.
IMPORTANT
Do not change the Argon Beam Shift or other parameters except for focus and
magnification. If Argon Beam Shift or other parameters are changed, the Argon Beam Shift
will no longer be correct.
2
In order to achieve the desired argon incidence angle, adjust a suitable combination of stage
rotation and tilt according to the formulas:
-
Polar angle = arctan[sin
R*sin(-50°) + cos
R*(cos
T*sin(-2.5°) - sin
T)]
-
Azimuthal angle = arctan[cos
R*sin(-50°) - sin
R*(cos
T*sin(-2.5°) - sin
T)]
Table 1.1: Argon incidence angle calculation
IMPORTANT
The vertical angle between FIB and argon beam (in these formulas: -2.5°) may vary slightly
depending on the mechanical alignment of your Argon Ion Beam System. Change this
value accordingly in the formulas.
1
Azimuthal angle
4
T
2
Polar angle
5
R
3
Argon beam
6
TEM lamella
6
1
2
3
4
5
Содержание Argon Ion Beam System
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